For the highly efficient and versatile polishing of metals, isotropic etching polishing (IEP), which is based on the merging of isotropic etching hole......
Large-stroke high-speed positioning stages play a significant role in microelectronic packaging manufacturing. Considering the problem of Z-axis bondi......
Confocal microscopy is high precision and widely used method for topography measurement. The surface height information is obtained by peak extraction......
This paper reports the design, modeling, and control of a novel three-degrees-of-freedom piezoelectric compliant microstage by introducing a new doubl......
Cutting force measurement is important for monitoring the diamond cutting process. In this paper, a new measurement method of thrust cutting force ass......
To improve positioning precision of the traveling wave ultrasonic motor (USM), a flexible shaft was used, and the structure was redesigned to reduce t......
Nano-finishing of material surfaces is an important class of technology in precision manufacturing. This paper presents a non-resonant vibration-assis......
The increasing adoption of exotic and hard to cut materials in high-end applications makes electric discharge machining (EDM) process more relevant th......
Aspheric optics has been widely employed in some high-tech industries for its superiority. In order to achieve the ultra-precision machining of these ......
In this study, a novel dynamic contour error compensation technique has been proposed for the elliptical vibration cutting process achieved through th......
The micro-grinding of complex meso/micro-components of hard and brittle materials have attracted much attention in recent years. However, little relat......
Gallium liquid metal ion source focused ion beam (FIB) instruments are widely used for cross-sectional sample preparation of specific areas of interes......
Transmission error is one of the most important performance indicators for evaluating harmonic drives, and can have crippling effects on positioning a......
In this paper, a static multi-longitudinal mode laser self-mixing absolute angle measurement system is developed to accurately monitor the deflection ......
The Part III of the four-part series of articles discusses the challenges and opportunities in microscale additive manufacturing processes, specifical......
