Thermomechanical Modeling and Optimization of Zero-Power Micromechanical Photoswitch-MedSci.cn - 梅斯（MedSci）

Thermomechanical Modeling and Optimization of Zero-Power Micromechanical Photoswitch

Kang, SH; Rajaram, V; Risso, A; Calisgan, SD; Qian, ZY; Rinaldi, M

Kang, SH (通讯作者)，Northeastern Univ, Dept Elect & Comp Engn, Boston, MA 20115 USA.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022; 31 (2): 241

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