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Maskless Spatioselective Functionalization of Silicon Nanowires

Veerbeek, J; Huskens, J

Huskens, J (reprint author), Univ Twente, MESA Inst Nanotechnol, Mol NanoFabricat, POB 217, NL-7500 AE Enschede, Netherlands.

CHEMNANOMAT, 2018; 4 (8): 874

Abstract

Spatioselective functionalization of silicon nanowires was achieved without using a masking material. The designed process combines metal-assisted che......

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