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Simultaneously controlling heat conduction and infrared absorption with a textured dielectric film to enhance the performance of thermopiles

He, YQ; Wang, YL; Li, T

Li, T (corresponding author), Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, Shanghai 200050, Peoples R China.

MICROSYSTEMS & NANOENGINEERING, 2021; 7 (1):

Abstract

The heat conduction and infrared absorption properties of the dielectric film have a great influence on the thermopile performance. Thinning the diele......

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