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Investigations about Al and Cu-Based Planar Spiral Inductors on Sapphire for GaN-Based RF Applications

Lin, C; Zhan, T; Wang, JX; Li, JM; Liu, ZQ; Yi, XY

Liu, ZQ; Yi, XY (corresponding author), Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting, Beijing 100083, Peoples R China.; Liu, ZQ; Yi, XY (corresponding author), Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China.

APPLIED SCIENCES-BASEL, 2021; 11 (11):

Abstract

Conventionally, Cu is preferred over Al to fabricate integrated inductors with higher quality factors on either silicon or sapphire substrates, profit......

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