A 5.3 GHz Al0.76Sc0.24N Two-Dimensional Resonant Rods Resonator With a k(t)(2) of 23.9%-MedSci.cn - 梅斯（MedSci）

A 5.3 GHz Al0.76Sc0.24N Two-Dimensional Resonant Rods Resonator With a k(t)(2) of 23.9%

Zhao, XY; Kaya, O; Pirro, M; Assylbekova, M; Colombo, L; Simeoni, P; Cassella, C

Zhao, XY (通讯作者)，Northeastern Univ, Dept Elect & Comp Engn ECE, Boston, MA 02115 USA.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022; 31 (4): 561

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