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Effect of Etched Silicon Substrate on Structural, Morphological, and Optical Properties of Deposited ZnO Films via DC Sputtering

Abdallah, B; Hussin, R; Zetoune, W

Abdallah, B (通讯作者),Atom Energy Commiss, Dept Phys, POB 6091, Damascus, Syria.

AEROSOL SCIENCE AND ENGINEERING, 2022; 6 (1): 30

Abstract

In this work, ZnO films are deposited by magnetron sputtering [using direct current (DC)], on polished silicon substrate Si(100) (non-etched), etched ......

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