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Submicron structures created on Ni thin film by submicron focusing of femtosecond EUV light pulses

Motoyama, H; Iwasaki, A; Mimura, H; Yamanouchi, K

Yamanouchi, K (通讯作者),Univ Tokyo, Sch Sci, Dept Chem, 7-3-1 Hongo, Bunkyo, Tokyo 1130033, Japan.

APPLIED PHYSICS EXPRESS, 2023; 16 (1):

Abstract

Using a newly developed submicron focusing system equipped with a large-aperture Wolter mirror with a precisely figured surface, we irradiate a Ni thi......

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