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A cost-effective fluorination method for enhancing the performance of metal oxide thin-film transistors

Deng, SB; Dong, SC; Chen, RS; Zhong, W; Li, GJ; Zhang, M; Yeung, FSY; Wong, M; Kwok, HS

Dong, SC; Chen, RS (corresponding author), Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, State Key Lab Adv Displays & Optoelect Technol, Kowloon, Hong Kong, Peoples R China.; Dong, SC (corresponding author), Hong Kong Univ Sci & Technol, Inst Adv Study, Kowloon, Hong Kong, Peoples R China.

JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY, 2021; 29 (5): 318

Abstract

Fluorination is a common technique for enhancing the performance of metal oxide (MO) thin-film transistors (TFTs). However, it usually requires extra ......

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