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Comprehensive study of crystalline AlN/sapphire templates after high-temperature annealing with various sputtering conditions

Gu, W; Liu, ZB; Guo, YN; Wang, XD; Jia, XL; Liu, XF; Zeng, YP; Wang, JX; Li, JM; Yan, JC

Liu, ZB; Yan, JC (corresponding author), Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Solid State Lighting, Beijing 100083, Peoples R China.; Liu, ZB; Yan, JC (corresponding author), Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China.; Liu, ZB; Yan, JC (corresponding author), Beijing Engn Res Ctr 3rd Generat Semicond Mat & A, Beijing 100083, Peoples R China.

JOURNAL OF SEMICONDUCTORS, 2020; 41 (12):

Abstract

High-quality AlN/sapphire templates were fabricated by the combination of sputtering and high-temperature (HT) annealing. The influence of sputtering ......

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