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Effects of Sputtering Power on PtOx Films Prepared by Reactive Magnetron Sputtering

Kang, WB; Zhu, DM; Huang, ZB; Zhou, WC; Luo, F

Kang, WB (reprint author), Northwestern Polytech Univ, State Key Lab Solidificat Proc, Xian 710072, Peoples R China.

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2017; 17 (6): 3848

Abstract

PtOx films have been prepared by reactive magnetron sputtering on glass substrate without external heating and charactered by X-ray diffraction, X-ray......

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