Abstract
Klich, M; Lower, J; Wilczek, S; Mussenbrock, T; Brinkmann, RP
Klich, M (通讯作者),Ruhr Univ Bochum, Dept Elect Engn & Informat Technol, D-44780 Bochum, Germany.
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2022; 31 (4):