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A novel direct drive electromagnetic XY nanopositioning stage

Zhu, ZW; Chen, L; To, S

To, S (corresponding author), Hong Kong Polytech Univ, Dept Ind & Syst Engn, State Key Lab Ultraprecis Machining Technol, Kowloon, Hong Kong, Peoples R China.

CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2021; 70 (1): 415

Abstract

To overcome the inherent limitation of existing nanopositioning stages running in hundreds of micrometres, a novel normal-stressed electromagnetic act......

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