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First-Principles Study on Electron-Induced Excitations of Atomic Layer Deposition Precursors: Inelastic Electron Wave Packet Scattering with Cobalt Tricarbonyl Nitrosyl Co(CO)(3)NO Using Time-Dependent Density Functional Theory

Yao, XL; Lee, Y; Ceresoli, D; Cho, K

Cho, K (corresponding author), Univ Texas Dallas, Dept Mat Sci & Engn, Richardson, TX 75080 USA.

JOURNAL OF PHYSICAL CHEMISTRY A, 2021; 125 (21): 4524

Abstract

A quantitative study on inelastic electron scattering with a molecule is of significant importance for understanding the essential mechanisms of elect......

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