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MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies

Le, HT; Haque, RI; Ouyang, ZW; Lee, SW; Fried, SI; Zhao, D; Qiu, M; Han, AP

Le, HT (corresponding author), Harvard Univ, Rowland Inst Harvard, Cambridge, MA 02138 USA.; Han, AP (corresponding author), Tech Univ Denmark, Dept Mech Engn, Lyngby, Denmark.

MICROSYSTEMS & NANOENGINEERING, 2021; 7 (1):

Abstract

MEMS inductors are used in a wide range of applications in micro- and nanotechnology, including RF MEMS, sensors, power electronics, and Bio-MEMS. Fab......

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