Kinetic investigation of the planar multipole resonance probe under arbitrary pressure-MedSci.cn - 梅斯（MedSci）

Kinetic investigation of the planar multipole resonance probe under arbitrary pressure

Wang, CJ; Friedrichs, M; Oberrath, J; Brinkmann, RP

Wang, CJ (通讯作者)，Ruhr Univ Bochum, Inst Theoret Elect Engn, D-44780 Bochum, Germany.

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2022; 31 (10):

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