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Automated alignment in mask-free photolithography enabled by micro-LED arrays

Stonehouse, M; Blanchard, A; Guilhabert, B; Zhang, Y; Gu, E; Watson, IM; Herrnsdorf, J; Dawson, MD

Zhang, Y (corresponding author), Harbin Inst Technol Weihai, Informat Optoelect Res Inst, Weihai, Peoples R China.

ELECTRONICS LETTERS, 2021; 57 (19): 721

Abstract

We present an automated control system for micro scale positioning, based on single pixel imaging and fluorescence. By projecting a chequerboard array......

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