Electromechanical Equivalent Circuit Model for Axisymmetric PMUTs With Elastic Boundary Conditions-MedSci.cn - 梅斯（MedSci）

Electromechanical Equivalent Circuit Model for Axisymmetric PMUTs With Elastic Boundary Conditions

Chare, C; Gijsenbergh, P; Jeong, YB; Heremans, P; Cheyns, D; Genoe, J

Chare, C (通讯作者)，IMEC, B-3001 Leuven, Belgium.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022; 31 (3): 457

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