Closed-loop MOEMS accelerometer-MedSci.cn

Closed-loop MOEMS accelerometer

Taghavi, M; Abedi, A; Parsanasab, GM; Rahimi, M; Noori, M; Nourolahi, H; Latifi, H

Parsanasab, GM (通讯作者)，Shahid Beheshti Univ, Fac Elect Engn, Integrated Photon Lab, Tehran 1983963113, Iran.;Parsanasab, GM (通讯作者)，Shahid Beheshti Univ, Fac Elect Engn, Tehran 1983963113, Iran.