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Highly Transparent and Conductive W-Doped ZnO/Cu/W-Doped ZnO Multilayer Source/Drain Electrodes for Metal-Oxide Thin-Film Transistors

Zhang, XN; Wang, BH; Sun, XW; Zheng, HW; Li, S; Zhang, PL; Zhang, WF

Zhang, XN (reprint author), Henan Univ, Key Lab Photovolta Mat, Sch Phys & Elect, Kaifeng 475004, Peoples R China.

IEEE ELECTRON DEVICE LETTERS, 2018; 39 (7): 967

Abstract

Here, we demonstrate transparent and conductive W-doped ZnO (WZO)/Cu/WZO multilayer films as source/drain (S/D) electrodes for metal-oxide thin-film t......

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