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Structure and optical properties of porous SiC film grown by magnetron sputtering on porous anodic aluminium oxide template

He, ZH; Li, JL; Liu, CH; Zhu, SF

He, ZH; Liu, CH (corresponding author), Wuhan Univ Technol, Sch Informat Engn, Wuhan 430070, Peoples R China.

PROCESSING AND APPLICATION OF CERAMICS, 2021; 15 (1):

Abstract

Porous fluorescent SiC films were deposited by magnetron sputtering (MS) using porous anodic aluminium oxide (AAO) template. In the first step AAO was......

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