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Polarity tuning of crystalline AlN films utilizing trace oxygen involved sputtering and post-high-temperature annealing

Liu, ZB; Guo, YA; Yan, JC; Zeng, YP; Wang, JX; Li, JM

Guo, YA; Yan, JC (corresponding author), Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Solid State Lighting, Beijing, Peoples R China.; Guo, YA; Yan, JC (corresponding author), Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing, Peoples R China.; Guo, YA; Yan, JC (corresponding author), Chinese Acad Sci, Inst Semicond, State Key Lab Solid State Lighting, Beijing, Peoples R China.; Yan, JC (corresponding author), Adv Ultraviolet Optoelect Co Ltd, Xian, Shaanxi, Peoples R China.

APPLIED PHYSICS EXPRESS, 2021; 14 (8):

Abstract

The polarity tuning of AlN films via introducing a period of trace oxygen supply in the initial sputtering process was demonstrated. High-temperature ......

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