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DMD-based three-dimensional chromatic confocal microscopy

Li, SB; Liang, RG

Liang, RG (corresponding author), Univ Arizona, Coll Opt Sci, Tucson, AZ 85721 USA.

APPLIED OPTICS, 2020; 59 (14): 4349

Abstract

In this paper, a digital mirror device (DMD)-based chromatic confocal microscopy is proposed and demonstrated for three-dimensional (3D) surface profi......

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