Baidu
map

Numerical simulation of atomic layer deposition for thin deposit formation in a mesoporous substrate

Zhuang, LW; Corkery, P; Lee, DT; Lee, S; Kooshkbaghi, M; Xu, ZL; Dai, GC; Kevrekidis, IG; Tsapatsis, M

Zhuang, LW (corresponding author), East China Univ Sci & Technol, Sch Chem Engn, 130 Meilong Rd, Shanghai 200237, Peoples R China.; Zhuang, LW; Tsapatsis, M (corresponding author), Johns Hopkins Univ, Dept Chem & Biomol Engn, 3400 North Charles St, Baltimore, MD 21218 USA.

AICHE JOURNAL, 2021; 67 (8):

Abstract

ZnO deposition in porous gamma-Al2O3 via atomic layer deposition (ALD) is the critical first step for the fabrication of zeolitic imidazolate framewor......

Full Text Link


Baidu
map
Baidu
map
Baidu
map