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Physical properties of amorphous molybdenum silicide films for single-photon detectors

Zhang, XF; Charaev, I; Liu, HL; Zhou, TX; Zhu, D; Berggren, KK; Schilling, A

Zhang, XF (corresponding author), Univ Zurich, Dept Phys, CH-8057 Zurich, Switzerland.; Zhang, XF (corresponding author), Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China.; Zhang, XF (corresponding author), Chinese Acad Sci, Ctr Excellence Superconduct Elect, Shanghai 200050, Peoples R China.; Charaev, I (corresponding author), MIT, 50 Vassar St, Cambridge, MA 02139 USA.

SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 2021; 34 (9):

Abstract

We systematically investigated the physical properties of amorphous Mo (x) Si1-x films deposited by magnetron co-sputtering. The critical temperature ......

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