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The multi-segment adaptive control of the high temperature heat source in a MOCVD vacuum reactor

Chiu, JC; Hu, CK; Tung, PC; Li, TT

Tung, PC (reprint author), Natl Cent Univ, Dept Mech Engn, Taoyuan 320, Taiwan.

2017 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC 2017), 2017; ( ):

Abstract

This research focuses on the adaptive control for a high temperature heat source. The significant characteristic of adaptive control is self-regulatio......

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