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A nano-radian precision absolute local slope measurement method for X-ray reflectors

Wu, H; Ran, ZR; Chen, X; Li, JL; Yang, Z; Zhang, ZY; Wu, P; Du, CL

Wu, P (通讯作者),Harbin Inst Technol, Dept Phys, Harbin 150001, Heilongjiang, Peoples R China.;Wu, P (通讯作者),Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing 400714, Peoples R China.

OPTICS EXPRESS, 2023; 31 (14): 23642

Abstract

Ultra-precise reflectors in the advanced light source facilities urgently call for local slope error measurements with nano-radian precision. However,......

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