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Plasma Treatment of Ultrathin Layered Semiconductors for Electronic Device Applications

Jadwiszczak, J; Kelly, DJ; Guo, JQ; Zhou, YB; Zhang, HZ

Jadwiszczak, J (corresponding author), Columbia Univ, Dept Elect Engn, New York, NY 10027 USA.

ACS APPLIED ELECTRONIC MATERIALS, 2021; 3 (4): 1505

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