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Polarized holographic lithography system for high-uniformity microscale patterning with periodic tunability

Xue, GP; Zhai, QH; Lu, HO; Zhou, Q; Ni, K; Lin, LY; Wang, XH; Li, XH

Li, XH (corresponding author), Tsinghua Univ, Tsinghua Shenzhen Int Grad Sch, Tsinghua Campus, Shenzhen 518055, Peoples R China.; Li, XH (corresponding author), Tsinghua Univ, Tsinghua Berkeley Shenzhen Inst, Tsinghua Campus, Shenzhen 518055, Peoples R China.

MICROSYSTEMS & NANOENGINEERING, 2021; 7 (1):

Abstract

Periodic microscale array structures play an important role in diverse applications involving photonic crystals and diffraction gratings. A polarized ......

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