Shape and Roughness Extraction of Line Gratings by Small Angle X-Ray Scattering: Statistics and Simulations-MedSci.cn - 梅斯（MedSci）

Shape and Roughness Extraction of Line Gratings by Small Angle X-Ray Scattering: Statistics and Simulations

Reche, J; Gergaud, P; Blancquaert, Y; Besacier, M; Freychet, G

Reche, J (通讯作者)，Univ Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France.

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2022; 35 (3): 425

科室
- - 订阅+
  - 更多科室
工具
服务