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Towards B-doped p-BaSi2 films on Si substrates by co-sputtering of BaSi2, Ba, and B-doped Si targets

Hasebe, H; Kido, K; Takenaka, H; Mesuda, M; Toko, K; Migas, DB; Suemasu, T

Suemasu, T (通讯作者),Univ Tsukuba, Fac Pure & Appl Sci, Dept Appl Phys, Tsukuba, Ibaraki 3058573, Japan.

JAPANESE JOURNAL OF APPLIED PHYSICS, 2023; 62 (SD):

Abstract

BaSi2 is one of the emerging materials for thin-film solar cell applications; hence the conductivity control by impurity doping is of great importance......

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