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High accuracy step gauge interferometer

Byman, V; Jaakkola, T; Palosuo, I; Lassila, A

Byman, V (reprint author), VTT Tech Res Ctr Finland Ltd, Ctr Metrol MIKES, Tekniikantie 1, FIN-02150 Espoo, Finland.

MEASUREMENT SCIENCE AND TECHNOLOGY, 2018; 29 (5):

Abstract

Step gauges are convenient transfer standards for the calibration of coordinate measuring machines. A novel interferometer for step gauge calibrations......

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