Verified modeling of a low pressure hydrogen plasma generated by electron cyclotron resonance-MedSci.cn - 梅斯（MedSci）

Verified modeling of a low pressure hydrogen plasma generated by electron cyclotron resonance

Sigeneger, F; Ellis, J; Harhausen, J; Lang, N; van Helden, JH

Sigeneger, F (通讯作者)，Leibniz Inst Plasma Sci & Technol, Felix Hausdorff Str 2, D-17489 Greifswald, Germany.

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2022; 31 (10):

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