Fabrication of Polymer Membrane-Suspended Microstructures on Printed Circuit Boards-MedSci.cn - 梅斯（MedSci）

Fabrication of Polymer Membrane-Suspended Microstructures on Printed Circuit Boards

Ahmad, T; Binder, S; Leber, M; Garrett, TJ; Reiche, CF; Solzbacher, F

Reiche, CF (通讯作者)，Univ Utah, Dept Elect & Comp Engn, Salt Lake City, UT 84112 USA.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022; 31 (3): 435

科室
- - 订阅+
  - 更多科室
工具
服务