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Surface Functionalization and Bonding of Chemically Inert Parylene Microfluidics Using Parylene-A Adhesive Layer

Jung, BJ; Jang, H; Lee, GY; Kim, J; Song, Z; Pyun, JC; Lee, W

Lee, W (通讯作者),Korea Adv Inst Sci & Technol KAIST, Grad Sch Nanosci & Technol, Daejeon 34141, South Korea.;Pyun, JC (通讯作者),Yonsei Univ, Mat Sci & Engn, Seoul 03722, South Korea.;Lee, W (通讯作者),Korea Adv Inst Sci & Technol KAIST, Dept Phys, Daejeon 34141, South Korea.;Lee, W (通讯作者),Korea Adv Inst Sci & Technol KAIST, Dept Bio & Brain Engn, Daejeon 34141, South Korea.

BIOCHIP JOURNAL, 2022; 16 (2): 168

Abstract

Parylene microfluidic systems have been utilized for applications requiring properties such as high chemical resistance, high internal pressure, high ......

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