Structural Changes in Nanometer-Thick Silicon-on-Insulator Films During High-Temperature Annealing-MedSci.cn - 梅斯（MedSci）

Structural Changes in Nanometer-Thick Silicon-on-Insulator Films During High-Temperature Annealing

Tyschenko, IE; Spesivtsev, EV; Shklyaev, AA; Popov, VP

Tyschenko, IE (通讯作者)，Russian Acad Sci, Siberian Branch, Rzhanov Inst Semicond Phys, Novosibirsk 630090, Russia.

SEMICONDUCTORS, 2022; 56 (3): 223

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