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Recent advances in silicon nitride-based photonic devices and applications

Fan, ZB; Chen, ZM; Zhou, X; He, XT; Jiang, SJ; Dong, JW

Dong, JW (corresponding author), Sun Yat Sen Univ, Sch Phys, Guangzhou 510275, Peoples R China.; Dong, JW (corresponding author), Sun Yat Sen Univ, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Peoples R China.

CHINESE OPTICS, 2021; 14 (4): 998

Abstract

Silicon nitride provides a CMOS-compatible integrated photonic platform with rich optical properties. By adjusting the relevant fabrication parameters......

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