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Fabrication of large-scale flexible silicon membrane by crystal-ion-slicing technique using BCB bonding layer

Zhu, DL; Luo, WB; Pan, TS; Huang, ST; Zhang, KS; Xie, Q; Shuai, Y; Wu, CG; Zhang, WL

Luo, WB (corresponding author), Univ Elect Sci & Technol China, Sch Elect Sci & Engn, Chengdu 610054, Peoples R China.; Luo, WB (corresponding author), Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China.

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2021; 127 (9):

Abstract

Flexible electronics is one of the most emerging fields of future electronic devices. The application of flexible inorganic membrane provides a feasib......

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