Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging-MedSci.cn - 梅斯（MedSci）

Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging

Frascaroli, J; Tonini, M; Colombo, S; Livellara, L; Mariani, L; Targa, P; Fumagalli, R; Samu, V; Nagy, M; Molnar, G; Horvath, A; Bartal, Z; Kiss, Z; Sipocz, T; Mica, I

Frascaroli, J (通讯作者)，STMicroelectronics, I-20864 Agrate Brianza, Italy.

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2022; 35 (3): 540

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