Abstract
Klemash, MEG; Bedair, SS; Kiebala, TM; Diamond, DA; Rudy, RQ; Tseng, VFG
Klemash, MEG (通讯作者),US Army Res Lab, Adelphi, MD 20783 USA.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022; 31 (3): 338