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Inkjet-Printed High-Q Nanocrystalline Diamond Resonators

Sartori, AF; Belardinelli, P; Dolleman, RJ; Steeneken, PG; Ghatkesar, MK; Buijnsters, JG

Sartori, AF; Ghatkesar, MK; Buijnsters, JG (reprint author), Delft Univ Technol, Dept Precis & Microsyst Engn, Mekelweg 2, NL-2628 CD Delft, Netherlands.

SMALL, 2019; 15 (4):

Abstract

Diamond is a highly desirable material for state-of-the-art micro-electromechanical (MEMS) devices, radio-frequency filters and mass sensors, due to i......

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