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A single-beam 3DoF homodyne interferometer

Yu, L; Molnar, G; Werner, C; Weichert, C; Koning, R; Danzebrink, HU; Tan, JB; Flugge, J

Yu, L (corresponding author), Harbin Inst Technol, Ctr Ultraprecis Optoelect Instrument Engn, Harbin 150080, Peoples R China.; Yu, L (corresponding author), Phys Tech Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany.; Yu, L (corresponding author), Harbin Inst Technol, Minist Ind & Informat Technol, Key Lab Ultraprecis Intelligent Instrumentat, Harbin 150080, Peoples R China.

MEASUREMENT SCIENCE AND TECHNOLOGY, 2020; 31 (8):

Abstract

In this paper, a camera-based 3DoF homodyne interferometer is proposed to measure displacements and rotations with precision below nanometre/microradi......

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