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DESIGN AND CHARACTERIZATION OF A MINIATURE THREE-AXIAL MEMS FORCE SENSOR

Li, J; Zhang, Z; Duan, BA; Sun, HY; Zhang, YL; Yang, L; Dai, M

Yang, L (corresponding author), Air Force Med Univ, Dept Aerosp Med, Xian 710072, Peoples R China.; Dai, M (corresponding author), Air Force Med Univ, Dept Biomed Engn, Xian 710072, Peoples R China.

JOURNAL OF MECHANICS IN MEDICINE AND BIOLOGY, 2020; 20 (10):

Abstract

This paper reports the design, fabrication and calibration results of a miniature cross-shaped three-axial piezoresistive force sensor, which can simu......

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