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Coupling Effects of CH4/H-2/Ar Gas Ratios and Hot Filament-Substrate Distance on the Growth of Nanocrystalline Diamond

Deng, B; Wei, QP; Yi, MK; Luo, YJ; Li, L; Zhou, KC; Ma, L

Wei, QP (corresponding author), Cent South Univ, Sch Powder Met, State Key Lab Powder Met, Changsha 410083, Peoples R China.

JOURNAL OF SUPERHARD MATERIALS, 2020; 42 (3): 157

Abstract

Due to the special shape of cutting or grinding tools used nowadays, hot filament (HF)-substrate distance is usually unavoidable during the process of......

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