Three-Degree-of-Freedom Electromagnetic Microactuator With Powder-Based Sm-Fe-N Magnets and Parylene Beams-MedSci.cn - 梅斯（MedSci）

Three-Degree-of-Freedom Electromagnetic Microactuator With Powder-Based Sm-Fe-N Magnets and Parylene Beams

Wang, HY; Yamada, S; Matsuura, M; Sugimoto, S; Tanaka, S

Wang, HY (通讯作者)，Tohoku Univ, Sch Engn, Dept Robot, Sendai, Miyagi 9808577, Japan.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022; 31 (4): 634

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