Abstract
Ding, XK; Chen, MZ; Liang, XG; Que, L
Que, L (通讯作者),Iowa State Univ, Dept Elect & Comp Engn, Ames, IA 50011 USA.;Liang, XG (通讯作者),Univ Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022; 31 (6): 971