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A Novel Three-Axial Magnetic-Piezoelectric MEMS AC Magnetic Field Sensor

Yeh, PC; Duan, H; Chung, TK

Chung, TK (reprint author), Natl Chiao Tung Univ, Dept Mech Engn, Hsinchu 30010, Taiwan.; Chung, TK (reprint author), Natl Chiao Tung Univ, Int Coll Semicond Technol, Hsinchu 30010, Taiwan.

MICROMACHINES, 2019; 10 (10):

Abstract

We report a novel three-axial magnetic-piezoelectric microelectromechanical systems (MEMS) magnetic field sensor. The sensor mainly consists of two se......

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