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Chemical use in the semiconductor manufacturing industry

Kim, S; Yoon, C; Ham, S; Park, J; Kwon, O; Park, D; Choi, S; Kim, S; Ha, K; Kim, W

Yoon, C (reprint author), Seoul Natl Univ, Grad Sch Publ Hlth, Dept Environm Hlth Sci, 1 Gwanak Ro, Seoul, South Korea.; Yoon, C (reprint author), Seoul Natl Univ, Grad Sch Publ Hlth, Inst Hlth & Environm, 1 Gwanak Ro, Seoul, South Korea.

INTERNATIONAL JOURNAL OF OCCUPATIONAL AND ENVIRONMENTAL HEALTH, 2018; 24 (3-4): 109

Abstract

Background: The semiconductor industry is known to use a number of chemicals, but little is known about the exact chemicals used due to the ingredient......

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