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Reverse gate leakage mechanism of AlGaN/GaN HEMTs with Au-free gate

Jiang, X; Li, CH; Yang, SX; Liang, JH; Lai, LK; Dong, QY; Huang, W; Liu, XY; Luo, WJ

Liu, XY; Luo, WJ (通讯作者),Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China.;Liu, XY; Luo, WJ (通讯作者),Univ Chinese Acad Sci, Beijing 100190, Peoples R China.

CHINESE PHYSICS B, 2023; 32 (3):

Abstract

The reverse gate leakage mechanism of W-gate and TiN-gate AlGaN/GaN high-electron-mobility transistors (HEMTs) with N-2 plasma surface treatment is in......

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