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MEMS thermal-piezoresistive resonators, thermal-piezoresistive oscillators, and sensors

Wei, L; You, ZW; Kuai, XB; Zhang, ML; Yang, FH; Wang, XD

Wang, XD (通讯作者)，Chinese Acad Sci, Inst Semicond, Engn Res Ctr Semicond Integrated Technol, Beijing 100083, Peoples R China.;Wang, XD (通讯作者)，Univ Chinese Acad Sci, Sch Microelect, Beijing 100049, Peoples R China.;Wang, XD (通讯作者)，Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China.;Wang, XD (通讯作者)，Beijing Acad Quantum Informat Sci, Beijing 100193, Peoples R China.;Wang, XD (通讯作者)，Beijing Engn Res Ctr Semicond Micronano Integrate, Beijing 100083, Peoples R China.

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2023; 29 (1): 1

Abstract

Microelectromechanical systems (MEMS) thermal-piezoresistive resonator (TPRs) and thermal-piezoresistive oscillator (TPO) use thermal actuation and re......

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